Publication

Year 2023 (9 papers)†

  1. Shunsuke Yamada and Hiroshi Toshiyoshi, "Battery-less luminance sensor biomimicking human sensory nervous system," Applied Physics Letters, vol. 123, 2023, p. 264101. https://doi.org/10.1063/5.0181949
  2. Shunsuke Yamada and Hiroshi Toshiyoshi, "A biodegradable ionic gel for stretchable ionics," Sensors and Actuators: A. Physical, vol. 361, 2023, p. 114574. https://doi.org/10.1016/j.sna.2023.114574
  3. Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Pixel-Parallel 3-Layer Stacked CMOS Image Sensors Using Double-Sided Hybrid Bonding of SOI Wafers," IEEE Transaction on Electron Devices. (published online) https://doi.org/10.1109/TED.2023.3298308
  4. Ten Sekiguchi, Hidetaka Ueno, Vivek Anand Menon, Ryo Ichige, Yuya Tanaka, Hiroshi Toshiyoshi, and Takaaki Suzuki, "UV-curable PDMS Photolithography and Its Application for Flexible Mechanical Metamaterials," Sensors and Materials, vol. 35, no. 6(2), 2023, pp. 1995-2011. https://doi.org/10.18494/SAM4351
  5. Gen Hashiguchi and Hiroshi Toshiyoshi, "An Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response," Sensors and Materials, vol. 35, no. 6(2), 2023, pp. 1957-1983. https://doi.org/10.18494/SAM4367
  6. Hiroaki Honma, Sho Ikeno, and Hiroshi Toshiyoshi, "MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging," Sensors and Materials, vol. 35, no. 6(2), 2023, pp. pp. 1941-1955. https://doi.org/10.18494/SAM4402
  7. Nicolas Lobato-Dauzier, Robin Deteix, Guillaume Gines, Alexandre Baccouche, Benediktus Nixon Hapsianto, Shu Okumura, Guilhem Mariette, Djaffar Belharet, Samuel Lequeste, Laurent Jalabert, Matthieu Denoual, Yannick Rondelez, Hiroshi Toshiyoshi, Hiroyuki Fujita, Soo Hyeon Kim, Teruo Fujii, and Anthony J. Genot, "Silicon as a microfluidic material for imaging and incubation of droplets," Lab on a Chip, vol. 23, 2023, pp. 2854-2865. https://pubs.rsc.org/en/content/articlelanding/2023/lc/d2lc01143c
  8. 三田　信、年吉　洋、「静電駆動カンチレバーを用いたＭＥＭＳ自励発振子」、電気学会Ｅ部門誌、vol. 143、no. 4, 2023 https://doi.org/10.1541/ieejsmas.143.55
    • Makoto Mita and Hiroshi Toshiyoshi, "Self-excited MEMS Oscillator using an Electrostatic Cantilever," IEEJ Transaction on Sensors and Micromachines, vol. 143, no. 4, 2022, pp. 55-61. https://doi.org/10.1541/ieejsmas.143.55 (in Japanese)
  9. Shunsuke Yamada and Hiroshi Toshiyoshi, "A Normally off Time-of-Event Logging System Triggered by A Battery-less Sensor," Sensors and Actuators: A. Physical, vol. 354, 2023, p.114306. https://doi.org/10.1016/j.sna.2023.114306
  10. Yoshiki Ohata, Masaaki Araidai, Takuma Ishiguro, Hiroyuki Mitsuya, Hiroshi Toshiyoshi, Yasushi Shibata, Gen Hashiguchi, and Kenji Shiraishi, "Effect of hydrogen atoms on potassium-ion electrets used in vibration-powered generators," Materials Science in Semiconductor Processing, vol. 157, April 2023 (special issue: Control of Semiconductor Interfaces (ISCSI-IX)). https://doi.org/10.1016/j.mssp.2022.107306
↑

Year 2022 (7 papers)†

  1. Yoshiki Ohata, Toru Nakanishi, Kenta Chokawa, Masaaki Araidai, Takuma Ishiguro, Hiroyuki Mitsuya, Hiroshi Toshiyoshi, Yasushi Shibata, Gen Hashiguchi, and Kenji Shiraishi, "Improvement of the reliability of potassium-ion electrets thorough an additional oxidation process," Applied Physics Letters, vol. 121, 2022, pp. 243903-1~5. https://doi.org/10.1063/5.0129247
  2. 三田　信、年吉　洋、「着陸レーザーレーダ用２次元ＭＥＭＳ光スキャナ」、日本航空宇宙学会論文誌、２０２１年２１巻、ｐｐ．６２−６７． https://doi.org/10.2322/astj.21.62
    • Makoto Mita and Hiroshi Toshiyoshi, "A 2-Dimensional MEMS Optical Scanner for Landing Laser Rader," Koku-Uchu-Gijyutsu (Aerospace Technology Japan, the Japan Society for Aeronautical and Space Sciences)､vol. 21, 2022, pp. 62-67. https://doi.org/10.2322/astj.21.62 (in Japanese)
  3. Dongchen Zhu, Anne-Claire Eiler, Satoshi Ihida, Yasuyuki Sakai, Hiroshi Toshiyoshi, Agnès Tixier-Mita, and Kikuo Komori, "Real-time Measurement of Pancreatic ß Cell Electrophysiology with Fluorescent Bioimaging Based on High-resolution Thin-film Transistor Microelectrode Arrays," IEEJ Trans. SM, vol. 142, no. 10, 2022, pp. 266-272. https://doi.org/10.1541/ieejsmas.142.266
  4. Hiroaki Honma and Hiroshi Toshiyoshi, "Double-Deck MEMS Electrostatic Vibrational Energy Harvester with Airborne Interconnection," IEEJ Trans. SM, vol. 142, no. 9, 2022, pp. 215-219. https://doi.org/10.1541/ieejsmas.142.215
  5. 三屋裕幸、橋本勝文、張　凱淳、芦澤久幸、下村典子、門間達希、本間浩章、橋口　原、年吉　洋、塩谷智基、「ＭＥＭＳ振動発電型イベントドリブンセンサを用いた橋梁の低消費電力異常周波数監視システム」、電気学会センサ・マイクロマシン部門誌、第１４２巻、第７号、２０２２年、ｐｐ．１３９−１４６．（センサシンポジウム受賞論文特集号） https://doi.org/10.1541/ieejsmas.142.139
    • Hiroyuki Mitsuya, Katsufumi Hashimoto, Kai-Chun Chang, Hisayuki Ashizawa, Noriko Shimomura, Tatsuki Momma, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi, and Tomoki Shiotani, "Low-Power Frequency Monitoring System for Bridge using MEMS Vibrational-Energy Harvesting Sensor," IEEJ Transaction on Sensors and Micromachines, vol. 142, no. 7, 2022, pp. 139-146. https://doi.org/10.1541/ieejsmas.142.139 (in Japanese)
  6. Mizuki Morikawa, Yasushi Shibata, Hiroshi Toshiyoshi, and Gen Hashiguchi, "MEMS switching voltage regulator using a normally-on electret relay," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 31, no. 3, 2022, pp. 424 - 434. https://ieeexplore.ieee.org/document/9740622
  7. Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks," Sensors and Materials, vol. 34, no. 4(3), 2022, pp. 1527-1538. https://sensors.myu-group.co.jp/article.php?ss=3785
↑

Year 2021 (13 papers)†

  1. Yukiya Tohyama, Hiroaki Honma, Hiroshi Toshiyoshi, and Daisuke Yamane, "Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-Boost Rectifier Circuit," Sensors and Materials, vol. 34, no. 5, 2022, pp. 1889-1897. https://sensors.myu-group.co.jp/sm_pdf/SM2939.pdf
  2. Hiroaki Honma, Yukiya Tohyama, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Power Enhancement of MEMS Vibrational Electrostatic Energy Harvester by Stray Capacitance Reduction," Journal of Micromechanics and Microengineering, vol. 31, no. 12, 2021, p.125008 (11pp). https://doi.org/10.1088/1361-6439/ac2e46
  3. Dongchen Zhu, Grant Cathcart, Satoshi Ihida, Hiroshi Toshiyoshi, Agnès Tixier-Mita, Yasuyuki; Sakai, Kikuo Komori, "Toward the development of a label-free multiple immunosensor based on thin film transistor microelectrode arrays," J. Micromech. Microeng., vol. 31, 2021, p.115002(7pp). https://doi.org/10.1088/1361-6439/ac2547
  4. 柳田幸祐、飯田泰基、本間浩章、橋口　原、年吉　洋、鈴木孝明、「３Ｄリソグラフィ法により作製した微細構造を接触界面に有するトライボ発電デバイス」、電気学会センサ・マイクロマシン部門誌、第１４１巻、第７号、２０２１年、ｐｐ．２５４−２５９ https://doi.org/10.1541/ieejsmas.141.254
    • Kosuke Yanagita, Taiki Iida, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi, and Takaaki Suzuki, "Triboelectric Nanogenerator with Microstructure Fabricated by 3D Lithography at Contact Interface," IEEJ Transaction on Sensors and Micromachines, vol. 141, no. 7, 2021, pp. 254-259. https://doi.org/10.1541/ieejsmas.141.254 (in Japanese)
  5. Mohammed S. Khan, Changdae Keum, Yi Xiao, Keiji Isamoto, Nobuhiko Nishiyama, Hiroshi Toshiyoshi, "MEMS-VCSEL as a tunable light source for OCT imaging of long working distance," J. Opt. Microsyst. 1(3), 034503 (2021). http://dx.doi.org/10.1117/1.JOM.1.3.034503
  6. Spyridon Bakas, Deepak Uttamchandani, Hiroshi Toshiyoshi, and Ralf Bauer, ”MEMS enabled miniaturized light-sheet microscopy with all optical control,” Scientific Reports, vol. 11, 2021, Article number: 14100. https://www.nature.com/articles/s41598-021-93454-8
  7. Wan–Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Hideki Hosoda, Agnès Tixier–Mita, Hiroshi Toshiyoshi, "Developments of the electroactive materials for non–enzymatic glucose sensing and their mechanisms," MDPI Electrochem., vol. 2, no. 2, 2021, pp. 347-389. https://www.mdpi.com/2673-3293/2/2/25
  8. 年吉　洋、橋口　原、「ＭＥＭＳエナジーハーベスタ用ＳｉＯ２エレクトレット」、セラミックス（日本セラミックス協会機関誌、誘電体材料研究特集号）、第５６巻、第７号（２０２１年７月号）、ｐｐ　４９２−４９５
    • Hiroshi Toshiyoshi and Gen Hashiguchi, "SiO2 Electret for MEMS Energy Hravester," CERAMICS JAPAN, vol. 56, no. 7 (July 2021), pp. 492-495. (in Japanese)
  9. 三屋裕幸、芦澤久幸、下村典子、本間浩章、橋口　原、年吉　洋、「ＭＥＭＳ振動発電の出力最大化チューニング手法」、電気学会センサ・マイクロマシン部門誌、第１４１巻、第７号、２０２１年、ｐｐ ２４５−２５３ https://doi.org/10.1541/ieejsmas.141.245
    • Hiroyuki Mitsuya, Hisayuki Ashizawa, Noriko Shimomura, Hiroaki Honma, Gen Hashiguchi, and Hiroshi Toshiyoshi, "A Method to Optimize the Output Power of MEMS Vibrational Energy Harvester," IEEJ Transaction on Sensors and Micromachines, vol. 141, no. 7, 2021 ,pp. 245-253. https://doi.org/10.1541/ieejsmas.141.245 (in Japanese)
  10. 遠山幸也、本間浩章、関屋英彦、年吉　洋、山根大輔、「低閾値整流昇圧回路を用いた非定常振動下における振動発電」、電気学会センサ・マイクロマシン部門誌、２０２１年７月号、ｐｐ　２２８−２３２ https://doi.org/10.1541/ieejsmas.141.228
    • Yukiya Tohyama, Hiroaki Honma, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane, "Energy Harvesting from Non-Stationary Vibrations using a Low-Threshold Voltage-Boost Rectifier Circuit," IEEJ Transaction on Sensors and Micromachines, vol. 141, no. 7, 2021, pp. 228-232. https://doi.org/10.1541/ieejsmas.141.228 (in Japanese)
  11. Hiroshi Toshiyoshi, "How do we define the efficiency of MEMS vibrational energy harvester?" Trans. IEEJ SM., vol. 141, no. 5, 2021, pp. 116-124. (review paper) https://doi.org/10.1541/ieejsmas.141.116
  12. Tomotaka Asari, Mamoru Miyachi, Yutaro Oda, Takaaki Koyama, Hiroaki Kurosu, Makoto Sakurai, Masanao Tani, Yoshiaki Yasuda, and Hiroshi Toshiyoshi, "Adaptive Driving Beam System with MEMS Optical Scanner for Reconfigurable Vehicle Headlight," SPIE J. Optical Microsystems, vol. 1, no. 1, 2021, pp. 014501-1~9. https://doi.org/10.1117/1.JOM.1.1.014501
  13. Anne-Claire Eiler, Pierre-Marie Faure, Junichi Sugita, Satoshi Ihida, Dongchen Zhu, Yasuyuki Sakai, Katsuhito Fujiu, Kikuo Komori, Hiroshi Toshiyoshi, and Agnès Tixier-Mita, "Application of a Thin-Film Transistor Array for Cellular-Resolution Electrophysiology and Electrochemistry," IEEE Transactions on Electron Devices (special issue of IEDM 2020), vol. 68, no. 4, 2021, pp. 2041-2048. https://ieeexplore.ieee.org/document/9334401
↑

Year 2020 (18 papers)†

  1. Toru Nakanishi, Takeshi Miyajima, Kenta Chokawa, Masaaki Araidai, Hiroshi Toshiyoshi, Tatsuhiko Sugiyama, Gen Hashiguchi, and Kenji Shiraishi, "Negative-charge-storing mechanism of potassium-ion electrets used for vibration-powered generators: Microscopic study of a-SiO2 with and without potassium atoms," Applied Physics Letters, vol. 117, no. 10, 2020, p. 193902. https://doi.org/10.1063/5.0029012
  2. 年吉　洋、「ＩｏＴ向けＭＥＭＳエナジーハーベスタ」、応用物理、第８９巻、第１０号、２０２０年、pp. 599-602（基礎講座・シリーズテーマ：ＩｏＴはどこまできたか　〜応用物理視点で見た現在位置と未来像〜） https://doi.org/10.11470/oubutsu.89.10_599
  3. Faruk Azam Shaik, Satoshi Ihida, Yoshiho Ikeuchi, Agnès Tixier-Mita, and Hiroshi Toshiyoshi, "TFT Sensor Array for Real-Time Cellular Characterization, Stimulation, Impedance Measurement and Optical Imaging of in-vitro Neural cells," Biosensors and Bioelectronics, vol. 169, 2020, p. 112546 (10p). https://doi.org/10.1016/j.bios.2020.112546
  4. Xufeng Liu, Takuya Takahashi, Masahiro Konishi, Kentaro Motohara, and Hiroshi Toshiyoshi, "Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-object Astronomical Spectroscopy," MDPI Micromachines, vol. 11, no. 8, 2020, pp. 782-798. https://doi.org/10.3390/mi11080782
  5. Shunsuke Yamada and Hiroshi Toshiyoshi, "A Temperature Sensor with A Water-Dissolvable Ionic Gel for Ionic Skin," ACS Applied Materials & Interfaces, vol. 12, no. 32, 2020, pp. 36449–36457. https://dx.doi.org/10.1021/acsami.0c10229
  6. Grant A. Cathcart, Agnès Tixier-Mita, Satoshi Ihida, Anne-Claire Eiler, and Hiroshi Toshiyoshi, “Non-Mutative Cell Viability Measurement on an IGZO Transparent Thin Film Transistor Electrode Array,” IEEJ Transactions on Sensors and Micromachines, vol. 140, no. 8, 2020, pp. 193-200. https://doi.org/10.1541/ieejsmas.140.193
  7. Anne-Claire Eiler, Junichi Sugita, Satoshi Ihida, Hiroshi Toshiyoshi, Katsuhito Fujiu, Timothée Lévi, and Agnès Tixier- Mita, Spike Sorting Tool for Analysis of Extracellular Cardiac Signals recorded by Thin-Film-Transistor Sensor Arrays, Journal of Robotics, Networking and Artificial Life, Volume 7, Issue 1, pp. 48 - 51, June, 2020. (https://doi.org/10.2991/jrnal.k.200512.010 )
  8. Naoki NAKATANI, Yuki HONDA, Masahide GOTO, Toshihisa WATABE, Masakazu NANBA, Yoshinori IGUCHI, Takuya SARAYA, Masaharu KOBAYASHI, Eiji HIGURASHI, Hiroshi TOSHIYOSHI, Toshiro HIRAMOTO, "Fabrication of Multi-Stacked Integrated Circuit for High Performance Image Sensors," Transactions of The Japan Institute of Electronics Packaging, vol. 13, no. 12, 2020, pp. E20-004-1-E20-004-3. *1 https://doi.org/10.5104/jiepeng.13.E20-004-1
  9. Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Agnès Tixier-Mita, and Hiroshi Toshiyoshi, "Electrocatalytic activity enhancement of Au NPs-TiO2 electrode via a facile redistribution process towards the non-enzymatic glucose sensors," Sensors & Actuators: B. Chemical, vol. 319, 2020, p. 128279 (12 pages). https://doi.org/10.1016/j.snb.2020.128279
  10. Hiroaki Honma, Yukiya Tohyama, Sho Ikeno, and Hiroshi Toshiyoshi, "Equivalent Circuit Model for MEMS Vibrational Energy Harvester Compatible with Sinusoidal and Non-sinusoidal Vibrations," Sensors and Materials, vol. 32, no. 7, 2020, pp. 2475-2492. https://doi.org/10.18494/SAM.2020.2821
  11. 年吉　洋、橋口　原、「エレクトレットを用いたＭＥＭＳ振動発電子の開発」、化学工学、第８４巻、第６号、２０２０、ｐｐ ２４〜２６ （特集：エネルギーハーベスティング：化学プラントのＩｏＴ化に向けて）
  12. 年吉　洋、本間浩章、三屋裕幸、橋口　原、「エレクトレット薄膜を用いた静電誘導型ＭＥＭＳ振動発電」、日本表面真空学会誌・表面と真空、第６３巻、第５号（特集「微小エネルギーの観測と制御」）、２０２０、２２３〜２２８.（微小エネルギーの観測と制御、研究紹介） https://doi.org/10.1380/vss.63.223
  13. 藤田博之、年吉　洋、高浦則克、「総論：本プロジェクトの期待と取り組みの概要説明」、電気学会誌（特集記事「スマートセンシングによる多様な現場での生産性向上への取り組み—センサ調整・解析自動化と高効率データ抽出機能—」）、２０２０年１４０巻５号、ｐｐ.２８０—２８１． https://doi.org/10.1541/ieejjournal.140.280
  14. 三屋裕幸、年吉　洋、「センサ端末の自立電源化を支える高効率振動発電」、電気学会誌（特集記事「スマートセンシングによる多様な現場での生産性向上への取り組み—センサ調整・解析自動化と高効率データ抽出機能—」）、２０２０年１４０巻５号、ｐｐ.２９５ー２９８． https://doi.org/10.1541/ieejjournal.140.295
  15. Hiroyuki Mitsuya, Hisayuki Ashizawa, Noriko Shimomura, Hiroaki Homma, Gen Hashiguchi, and Hiroshi Toshiyoshi, "A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester using Pure-White Noise," IEEE Transactions on Semiconductor Manufacturing, vol. 33, no. 2, 2020, pp. 180-186. https://doi.org/10.1109/TSM.2020.2983442
  16. Chikako Sano, Manabu Ataka, Gen Hashiguchi, and Hiroshi Toshiyoshi, "An electret-augmented low-voltage MEMS electrostatic out-of-plane actuator for acoustic transducer applications," Micromachines, vol. 11, no. 3, 2020, p. 267 (12 pages). https://doi.org/10.3390/mi11030267
  17. Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Agnès Tixier-Mita, and Hiroshi Toshiyoshi, "Roles of TiO2 in the highly robust Au nanoparticles-TiO2 modified polyaniline electrode towards non-enzymatic sensing of glucose," Talanta, vol. 212, 2020, p.120780. https://doi.org/10.1016/j.talanta.2020.120780
  18. Makoto Mita, Manabu Ataka, and Hiroshi Toshiyoshi, "Electrostatic Microelectromechanical Logic Devices by CMOS-compatible Surface Micromachining," Trans. IEEJ SM., vol. 140, no. 1, 2020, pp. 2-13. (英語論文特集号・優秀論文賞) https://doi.org/10.1541/ieejsmas.140.2
↑

Year 2019 (9 papers)†

  1. Vivek Menon, Matthieu Denoual, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Self-contained on-chip fluid actuation for flow initiation in liquid cell transmission electron microscopy," Japanese Journal of Applied Physics (Rapid Communication), vol. 58, 2019, p. 090909 (6pp). https://doi.org/10.7567/1347-4065/ab386a
  2. Wan-Ting Chiu, Yi-Hsuan Chiu, Ping-Yen Hsieh, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu, Agnès Tixier-Mita, Hiroshi Toshiyoshi, "Nano-Au catalysts modified with TiO2: Enhancement of electrocatalytic activity for 1-propanol oxidation in alkaline media," Journal of The Electrochemical Society, vol. 166, no. 12, 2019, pp. F760-F767. https://doi.org/10.1149/2.0741912jes
  3. Agnès Tixier-Mita, Satoshi Ihida, Damien Blanchard, Marie Shinohara, Anne-Claire Eiler, Grant Alexander Cathcart, Pierre-Marie Faure, Takashi Kohno, Yasuyuki Sakai, Timothee Levi, Hiroshi Toshiyoshi, "2D Dielectrophoresis Using an Active Matrix Array made by Thin-Film-Transistor Technology," IEEJ Transaction, vol. 14, 2019, pp. 1280–1288. (invited paper). https://doi.org/10.1002/tee.22979
  4. Hiroaki Honma, Yukiya Tohyama, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi, "A Power-Density-Enhanced MEMS Electrostatic Energy Harvester with Symmetrized High-Aspect Ratio Comb Electrodes," J. Micromech. Microeng., vol. 29, 2019, p. 084002 (9pp). https://doi.org/10.1088/1361-6439/ab2371
  5. Yukiya Tohyama, Hiroaki Honma, Brieux Durand, Tatsuhiko Sugiyama, Gen Hashiguchi, and Hiroshi Toshiyoshi, "An Analytical Model for MEMS Electret Energy Harvester with Long-stroke Tip-sliding Electrodes," Sensors and Materials, Vol. 31, No. 9(2), 2019, pp. 2779-2802. https://doi.org/10.18494/SAM.2019.2388
  6. Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Triple-Stacked Au/SiO2 Hybrid Bonding With 6-µm-Pitch Au Electrodes on Silicon-on-Insulator Substrates Using O2 Plasma Surface Activation for 3-D Integration," IEEE Transactions on Components, Packaging and Manufacturing Technology, vol. 9, no. 9, 2019, pp. 1904-1911. https://doi.org/10.1109/TCPMT.2019.2910863
  7. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, and Kazuya Masu, "A MEMS Accelerometer for Sub-mG Sensing," Sensors and Materials, Vol. 31, No. 9(2), 2019, pp. 2883-2894. (Selected as a High Commended Paper) https://doi.org/10.18494/SAM.2019.2122
  8. Hiroshi Toshiyoshi, Suna Ju, Hiroaki Honma, Chang-Hyeon Ji, and Hiroyuki Fujita, "MEMS vibrational energy harvesters," Sci. Techno. Adv. Mater., vol. 20, no. 1, 2019, pp. 124-143. (review paper) https://doi.org/10.1080/14686996.2019.1569828
  9. Shunsuke Yamada, Hiroyuki Mitsuya, Simpei Ono, Kazumoto Miwa, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Enhancement of electrostatic induction current of energy harvester by using a gelatinized ionic liquid," Trans. IEE Japan, vol. 139-E, No. 1, 2019, pp. 7-14. https://doi.org/10.1541/ieejsmas.139.7
↑

Year 2018 (12 papers)†

  1. Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Quarter Video Graphics Array Digital-Pixel Image Sensing with Linear and Wide-Dynamic-Range Response Using Pixel-Wise 3D Integration," IEEE Transactions on Electron Devices, vol. 66, no. 2, 2019, pp. 969-975. https://ieeexplore.ieee.org/document/8580538
  2. 年吉　洋、「無線センサ用ＭＥＭＳ振動発電デバイス」、非破壊検査（解説特集：Industry 4.0 を担う実践技術と将来を見据えた先端基礎技術）、vol 67、No. 6、2018、pp. 283-290. （解説）https://cir.nii.ac.jp/crid/1520290883625610624
  3. 橋口 原、杉山達彦、年吉 洋、「カリウムイオンエレクトレットを用いた新しいＭＥＭＳ技術の展開」、応用物理、vol. 87、no. 6、2018、pp.436-440. https://doi.org/10.11470/oubutsu.87.6_436
  4. Shunsuke Yamada and Hiroshi Toshiyoshi, "A Water Dissolvable Electrolyte with Ionic Liquid for Eco-friendly Electronics," Small, 21 June 2018, p. 1800937 (8 pages). https://doi.org/10.1002/smll.201800937
  5. Yu-Fan Chen, Satoshi Inoue, and Hiroshi Toshiyoshi, "An Electret-based Implantable Energy Harvester with Liquid Cells (MEMS vs. 3D Printing Fabrication)," IEEJ Trans. SM, vol. 138, no. 9, 2018, pp. 401-405. https://doi.org/10.1541/ieejsmas.138.401
  6. Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Improvement of Energy Conversion Effectiveness and Maximum Output Power of Electrostatic Induction-type MEMS Energy Harvesters by using Symmetric Comb-electrode Structures," Journal of Micromechanics and Microengineering, vol. 28, 2018, pp. 064005-064017 (13pp). http://iopscience.iop.org/article/10.1088/1361-6439/aab514
  7. Chikako Sano, Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Triboelectric energy harvesting with surface-charge-fixed polymer based on ionic liquid," Science and Technology of Advanced Materials, vol. 19, no. 1, 2018, pp. 317-323. https://doi.org/10.1080/14686996.2018.1448200
  8. Faruk Azam Shaik, Grant Alexander Cathcart, Satoshi Ihida, Yoshiho Ikeuchi, Agnès Tixier-Mita, Hiroshi Toshiyoshi, "Electrical stimulation, recording and impedance-based real-time position detection of cultured neurons using Thin-Film-Transistor array," IEEE/ASME Journal of Microelectromechanical Systems, vol. 27, no. 3, 2018, pp. 424-433. (Chosen as J-MEMS RightNow) https://doi.org/10.1109/JMEMS.2018.2810285
  9. Daigo Terutsuki, Hidefumi Mitsuno, Takeshi Sakurai, Yuki Okamoto, Agnès Tixier-Mita, Hiroshi Toshiyoshi, Yoshio Mita, and Ryohei Kanzaki, "Increasing cell-device adherence using cultured insect cells for receptor-based biosensors," Journal of the Royal Society Open Science, March 21, 2018. https://doi.org/10.1098/rsos.172366
  10. Satoshi Inoue, Takuya Takahashi, Momoko Kumemura, Kazunori Ishibashi, Hiroyuki Fujita, Gen Hashiguchi, and Hiroshi Toshiyoshi, "A Fluidic Vibrational Energy Harvester for Implantable Medical Device Applications," Electronics and Communications in Japan, vol. 101, no. 4, 2018, pp. 15-23. DOI:10.1002/ecj.12035 (English translation by John Wiley & Sons, Inc. from its original version published in IEEJ Transactions on Sensors and Micromachines Vol.137 No.6 pp.152-158.
  11. Yong Luo, Kazutaka Kikuta, Takuya Takahashi, Akira Hirose, and Hiroshi Toshiyoshi, "A Metamaterial Antenna with Programmable Spatial and Transient Radiation Beams by Using Monolithically Integrated RF-MEMS Switches," IEEJ Transactions on Sensors and Micromachines (E), vol. 138, no. 3, 2018, pp. 106-111. (https://doi.org/10.1541/ieejsmas.138.106 )
  12. Yong Luo, Jiayou Xu, Guangli Yang, and Hiroshi Toshiyoshi, "Electromagnetic radiation from the electrostatic nonlinear pull-in instability of MEMS," Electronics Letters, vol. 54, no. 2, 2018, pp. 68-70. (online: 21 November 2017) https://doi.org/10.1049/el.2017.3850
↑

Year 2017 (10 papers)†

  1. Zhengxi Cheng and Hiroshi Toshiyoshi, "CMOS-MEMS Micro-mirror Arrays by Post-processing ASMC 0.35 µm CMOS Chips," IEEE/ASME Journal of Microelectromechanical Systems, vol. 26, no. 6, 2017, pp. 1435-1441. (10.1109/JMEMS.2017.2764094)
  2. Hideaki Koga, Hiroyuki Mitsuya, Hiroaki Honma, Hiroyuki Fujita, Hiroshi Toshiyoshi, and Gen Hashiguchi, "Development of a cantilever-type electrostatic energy harvesters and its charging characteristics on a highway viaduct," MDPI Micromachines, vol. 8, no. 10, 2017, p. 293-307. (doi:10.3390/mi8100293)
  3. Shunsuke Yamada and Hiroshi Toshiyoshi, "Self-powered Artificial Sensory Nervous System using Ring Oscillator for Pulse Density Modulation," IEEE Electron Device Letters, vol. 38, no. 10, 2017, pp. 1477-1480. (DOI:10.1109/LED.2017.2742516)
  4. Sungho Jeon and Hiroshi Toshiyoshi, "MEMS tracking mirror system for bidirectional free-space optical link," Applied Optics, vol. 56, no. 24, 2017, pp. 6720-6727. (Chosen as an Editor's Pick)
  5. Shunsuke Yamada, Takaaki Sato, and Hiroshi Toshiyoshi, "A pressure sensitive ionic gel FET for tactile sensing," Applied Physics Letters, vol. 110, 2017, pp. 253501-1~4.
  6. Kota Ito, Kazutaka Nishikawa, Atsushi Miura, Hiroshi Toshiyoshi, and Hideo Iizuka, "Dynamic modulation of radiative heat transfer beyond the blackbody limit," ACS Nano Letters, vol. 17, no. 7, 2017, pp. 4347-4353. *2
  7. Faruk Shaik, Grant Cathcart, Satoshi Ihida, Myriam Lereau-Bernier, Eric Leclerc, Yasuyuki Sakai, Hiroshi Toshiyoshi, Agnès Tixier-Mita, "Thin-Film-Transistor array: an exploratory attempt for high throughput cell manipulation using electrowetting principle," Journal of Micromechanics and Microengineering, vol. 27, no. 5, 2017, p.054001-054012.
  8. 井上聡史、高橋巧也、久米村百子、石橋和徳、藤田博之、橋口　原、年吉　洋、「体内インプラント医療器具を想定した流体振動型エナジー・ハーベスタ」、電気学会論文誌Ｅ、vol. 137、No. 6、2017、pp. 152-158.
  9. Zhengxi Cheng and Hiroshi Toshiyoshi, "A design of an ultra-fast CMOS-MEMS multilayer Infrared emitter," IEEJ Trans. SM, vol. 137, no. 1, 2017, pp. 23-27.
  10. Eric Leclerc, Jean-Luc Duval, Christophe Egles, Satoshi Ihida, Hiroshi Toshiyoshi, and Agnès Tixier-Mita, "In vitro cyto-biocompatibility study of thin-film transistors substrates using an organotypic culture method," J. Matr. Sci: Matr. Med., vol. 28, no. 4, 2017, DOI 10.1007/s10856-016-5815-1.
↑

Year 2016 (17 papers)†

  1. Chikako Sano, Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Manabu Ataka, Gen Hashiguchi, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Electrostatic vibrational energy harvester with ionic liquid and potassium-ion-electret," Journal of Physics: Conference Series, vol. 773, 012068, Dec. 2016 (Proceeding paper reported in 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France).
  2. 三屋裕幸、小野新平、三輪一元、年吉　洋、藤田博之、「ゲル化イオン液体によるエナジーハーベスタ応用」、電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）、vol. 136、No. 6、2016、pp. 274-275.（センサシンポジウム特集号）
  3. M. Teranishi, T.-F. M. Chang, C.-Y. Chen, T. Konishi, K. Machida, H. Toshiyoshi, D. Yamane, K. Masu, and M. Sone, "Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers," Microelectronic Engineering, vol. 159, 2016, pp. 90-3.
  4. Zhengxi Cheng and Hiroshi Toshiyoshi, "Design of CMOS-MEMS broadband infrared emitter arrays integrated with metamaterial absorbers based on CMOS back-end-of-line," IET Micro & Nano Letters, 2016 (doi:10.1049/mnl.2016.0275)
  5. D. Yamane, T. Konishi, H. Toshiyoshi, K. Masu, and K. Machida, "A 1-mG MEMS Sensor," ECS Transactions, vol. 73, no. 3, 2016, pp. 7-14 (More-than-Moore-3 issue linked to The 229th ECS Meeting, May 29 - June 3, 2016, San Diego, CA, US) (invited)
  6. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu and Katsuyuki Machida, "Evaluation and Modeling of Adhesion Layer in Shock-Protection Structure for MEMS Accelerometer," Microelectronics Reliability, vol. 66, 2016, pp. 78-84.
  7. Masato Suzuki, Takashi Moriyama, Hiroshi Toshiyoshi, and Gen Hashiguchi, "MEMS electrostatic inductive transformer using potassium ion electret for up- or down-conversion of AC current," Jpn. J. Appl. Phys., vol. 55, no. 10, 2016, pp. 107201-1~8.
  8. Masato Suzuki, Hisayuki Ashizawa, Yasuhide Fujita, Hiroyuki Mitsuya, Tatsuhiko Sugiyama, Manabu Ataka, Hiroshi Toshiyoshi, and Gen Hashiguchi, "A Bistable Comb-Drive Electrostatic Actuator Biased by the Built-in Potential of Potassium Ion Electret," IEEE/ASME J. Microelectromech. Syst., vol. 25, no. 4, 2016, pp. 652-661. (online)
  9. Kota Ito, Hiroshi Toshiyoshi, and Hideo Iizuka, "Densely-tiled metal-insulator-metal metamaterial resonators with quasi-monochromatic thermal emission," Optics Express, vol. 24, no. 12, 2016, pp. 12803-12811, doi: 10.1364/OE.24.012803
  10. Yong Luo, Kazutaka Kikuta, Zhengli Han, Takuya Takahashi, Akira Hirose, Hiroshi Toshiyoshi, "An Active Metamaterial Antenna with MEMS-modulated Scanning Radiation Beams," IEEE Electron Device Letters, 10.1109/LED.2016.2565559 (Online publication, 2016-05-10)
  11. Agnès Tixier-Mita, Satoshi Ihida, Bertrand-David Ségard, Grant A. Cathcart, Takuya Takahashi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Review on thin-film transistor technology, its applications, and possible new applications to biological cells," Japanese Journal of Applied Physics, 55(4S), 2016, 04EA08. (review paper)
  12. Zhengxi Cheng and Hiroshi Toshiyoshi, "Design of integrated CMOS-MEMS infrared emitter arrays," IEICE Electronics Express, Article ID: 13.20160009.
  13. G. Hashiguchi, D. Nakasone, T. Sugiyama, M. Ataka, and H. Toshiyoshi, "Charging mechanism of electret film made of potassium-ion-doped SiO2," AIP Advances, vol. 6, no. 3, 2016, p. 035004-8.
  14. Kentaro Mori, Kensuke Misawa, Satoshi Ihida, Takuya Takahashi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A MEMS Electrostatic Roll-up Window Shade Array for House Energy Management System," IEEE Photon. Tech. Lett., vol. 28, no. 5, 2016, pp. 593-596.
  15. Kenichiro Urayama, Koichiro Akahori, Nobuyuki Adachi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Digitally Tuned RF-MEMS Varactors Implemented in an 800-MHz Low Phase Noise VCO," IEEJ Trans. SM, vol. 136, no. 2, 2016, pp. 44-54.（英語論文特集号・優秀論文賞）
  16. Kota Ito, Hiroshi Toshiyoshi, and Hideo Iizuka, "Metal-insulator-metal metamaterial absorbers consisting of proximity-coupled resonators with the control of the fundamental and the second-order frequencies," J. Appl. Phys. 119, 063101 (2016); http://dx.doi.org/10.1063/1.4941690
  17. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A dual-axis MEMS capacitive inertial sensor with high-density proof mass," Microsystem Technologies, vol. 22, 2016, pp. 459-464. (DOI 10.1007/s00542-015-2539-y)
↑

Year 2015 (12 papers)†

  1. Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "Terahertz Devices with Reconfigurable Metamaterial by Surface MEMS Technique," IEEJ Trans. SM, vol. 136, no. 11, 2015, pp. 450-453.
  2. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A 0.1G-to-20G Integrated MEMS Inertial Sensor," Jpn. J. Appl. Phys., vol. 54, 087202-1~4.
  3. Yong Luo, Kazutaka Kikuta, Zhengli Han, Takuya Takahashi, Akira Hirose, and Hiroshi Toshiyoshi, "Programmable leaky-wave antenna with periodic J-shaped metamaterial patches," Elec. Lett., vol. 51, no. 10, 2015, pp.733-734.
  4. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Pixel-Parallel 3-D Integrated CMOS Image Sensors with Pulse-Frequency-Modulation A/D Converters Developed by Direct Bonding of SOI Layers," IEEE Transactions on Electron Devices, vol. 62, no. 11, 2015, pp. 3530-3535.
  5. 李　永芳、冨澤　泰、杉山正和、年吉　洋、藤田博之、「耐摩耗プローブによる走査型プローブリソグラフィの描画安定性とスループットの向上」、日本機械学会論文集、vol. 81、no. 825、2015、p. 14-00504.(DOI:10.1299/transjsme.14-00504)
  6. Y. F. Li, K. H. Chen, Y. Ootera, H. Toshiyoshi, and H. Fujita, "Nanoelectrode lithography using flexible conductive molds," Applied Physics A, vol. 121, pp. 363-370. (DOI 10.1007/s00339-015-9138-8) (invited paper)
  7. Sungho Jeon, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A MEMS-based Interactive Laser Scanning Display with a Built-in Laser Range Finder," IEICE Elec. Express, vol. 12, no. 10, 2015, pp. 1-10.
  8. Kensuke Misawa, Tatsuhiko Sugiyama, Gen Hashiguchi, and Hiroshi Toshiyoshi, "A Reliability Study on Potassium Ion Electret in Silicon Oxide for Vibrational Energy Harvester Applications," Jpn. J. Appl. Phys., vol. 54, 2015, p. 067201. (DOI:10.7567/JJAP.54.067201)
  9. Y. F. Li, M. Sugiyama, H. Toshiyoshi, and H. Fujita, "Scalable throughput and Stable Scanning Probe Nanolithography Based on Local Anodic Oxidation by Arrayed Wear-insensitive Sidewall Microprobes," IEEE/ASME Journal of Microelectromechanical Systems, vol. 24, no. 5, pp. 1471-1478. (DOI:10.1109/JMEMS.2015.2412155)
  10. Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "Tunable Terahertz Filter and Modulator Based on Electrostatic MEMS Reconfigurable SRR Array," IEEE Journal of Selected Topics in Quantum Electronics (JSTQE), vol. 21, no. 4, 2015, pp. 1-9 (DOI 10.1109/JSTQE.2014.2378591)
  11. 伊藤晃太、松井崇行、飯塚英男、年吉 洋、「表面波と結合した回折格子中共鳴モードによる熱輻射制御〜光学解析と製作法検討〜」、電気学会論文誌Ｅ、vol. 135、no. 5、pp. 184-190. (in Japanese)
  12. Kota Ito, Atsushi Miura, Hideo Iizuka, and Hiroshi Toshiyoshi, "Parallel-plate submicron gap formed by micromachined low-density pillars for near-field radiative heat transfer," Applied Physics Letter, vol. 106, pp. 083504-1~4.
↑

Year 2014 (14 papers)†

  1. Kota Ito, Kazutaka Nishikawa, Hideo Iizuka, and Hiroshi Toshiyoshi, "Experimental investigation of radiative thermal rectifier using vanadium dioxide," Applied Physics Letter, vol. 105, 2014, pp. 253503-1~5.*3
  2. 見澤謙佑、丸山智史、橋口　原、年吉　洋、「電気回路シミュレータを用いたエレクトレットＭＥＭＳ素子の設計」、電気学会論文誌Ｅ、Vol. 134、No. 11、2014、pp. 357-365. (https://doi.org/10.1541/ieejsmas.134.357 )
  3. Zhengli Han, Kenta Kohno, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "MEMS reconfigurable metamaterial for terahertz switchable filter and modulator," Optics Express, vol. 22, no. 18, 2014, pp. 21326-21339.
  4. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Three-Dimensional Silicon-on-Insulator Integrated Circuits with NFET and PFET on Separate Layers Using Au/SiO2 Hybrid Bonding," IEEE Transactions on Electron Devices, vol. 61, no. 8, 2014, pp. 2886-2892.
  5. Yang-Che Chen, Tadashi Ishida, Hiroshi Toshiyoshi, Rongshun Chen, and Hiroyuki Fujita, "Spontaneous oscillation due to electrical charging effect in MEMS electrostatic switches," IEEJ Trans. Sensors and Micromachines, vol. 134, no. 11, 2014, pp. 338-348.
  6. Agnès Tixier-Mita, Isao Mori, Takuya Takahashi, Olivier Francais, Bruno Le Pioufle, Yoshio Mita, and Hiroshi Toshiyoshi, "Micro-Fluidic Channel Integration on Thick-SOI LSI Device for Biological Application," IEEJ Trans. Sensors and Micromachines, vol. 134, no. 10, 2014, pp. 320-325.
  7. Yongfang Li, Masakazu Sugiyama, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "A Mass-production-ready Anti-wear Probe for Scanning Probe Microscopy Lithography," Jpn. J. Appl. Phys., vol. 53, 2014, pp. 06JF04-1~5.
  8. Muneki Nakada, Changho Chong, Atsushi Morosawa, Keiji Isamoto, Takuya Suzuki, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Behavioral Model for Optically Powered OCT Endoscope with a Micro Electrostatic Vertical-Comb Optical Scanner," IEEJ Trans. on Electrical and Electronic Eng., vol. 9, no. 4, July, 2014, pp. 448-458.
  9. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Hiroshi Toshiyoshi, and Toshiro Hiramoto, “A Novel MOSFET with Vertical Signal-Transfer Capability for 3D-Structured CMOS Image Sensors,” IEEJ Trans., vol. 9, 2014, pp. 329-333.
  10. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, and Hiroshi Toshiyoshi, "A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology," Jpn. J. Appl. Phys., vol. 53, 2014, pp. 01EE15.1-7 (Special issue on SSDM 2013).
  11. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, and Kazuya Masu, "Design of sub-1g microelectromechanical systems accelerometers," Applied Physics Letters, vol. 104, 2014, 074102.
  12. Satoshi Maruyama, Makoto Mita, Keiji Isamoto, Changho Chong, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Equivalent Circuit Model for Semiparallel Plate Electrostatic Torsion Mirror," Electronics and Communications in Japan, vol. 97, no. 1, 2014, pp. 37-47. (Translation from Denki Gakkai Ronbunshi, vol. 132-E, no. 4, April 2012, pp. 77-85)
  13. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Katsuyuki Machida, Kazuya Masu, and Hiroshi Toshiyoshi, "An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology," Jpn. J. Appl. Phys., vol. 53, 027202, 2014, pp. 027202.1-027202.9
  14. 山根大輔、サン・ウィンストン、川崎繁男、藤田博之、年吉　洋、「水平駆動型ＭＥＭＳ導波路の静電駆動時における高周波特性の評価手法」、電子情報通信学会論文誌Ｃ, vol. J97-C, no. 1, pp. 37-45, Jan. 2014. (in Japanese)
↑

Year 2013 (6 papers)†

  1. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Ghou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu, "Novel Sensor Structure and its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer," Japanese Journal of Applied Physics (special issue on MNC 2012), vol. 52, no. 6, part 2, 2013, p. 06GL04.
  2. 冨澤　泰、李　永芳、古賀章浩、年吉　洋、安藤泰久、藤田博之、「ナノスケール摺動電気接点における接触抵抗安定性と耐摩耗性」、電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）、vol. 133、no. 6、2013、pp. 229-236.
  3. M. Mita, M. Ataka, and H. Toshiyoshi, "Microelectromechanical XNOR and XOR logic devices," IEICE Electronics Express, vol. 10, no. 8, 2013, pp. 1-12.
  4. Sunghan Choi, Akio Higo, Masaru Zaitsu, Myung-Joon Kwack, Masakazu Sugiyama, Hiroshi Toshiyoshi, and Yoshiaki Nakano, "Development of a Vertical Optical Coupler Using a Slanted Etching of InP/InGaAsP Waveguide," IEICE Electronics Express, vol. 10, no. 6, 2013, pp. 1-8.
  5. Toshifumi Konishi, Katsuyuki Machida, Satoshi Maruyama, Makoto Mita, Kazuya Masu, and Hiroshi Toshiyoshi, "A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language," IEEE/ASME J. Microelectromech. Syst., vol. 22, no. 3, Jun. 2013, pp. 755-767.
  6. K. Ishida, T.-C. Huang, K. Honda, Y. Shinozuka, H. Fuketa, T. Yokota, U. Zschieschang, H. Klauk, G. Tortissier, T. Sekitani, M. Takamiya, H. Toshiyoshi, T. Someya, and T. Sakurai, "Insole Pedometer With Piezoelectric Energy Harvester and 2V Organic Circuits," IEEE Journal of Solid-State Circuits, vol. 48, no. 1, 2013, pp. 255-264.
↑

Year 2012 (9 papers)†

  1. Y. Tomizawa, Y.-F. Li, A. Koga, H. Toshiyoshi, Y. Ando, G. Hashiguchi, and H. Fujita, "Electric Contact Stability of Anti-Wear Probes," IEICE Electronics Express, vol. 9, no. 21, 2012, pp. 1675-1682.
  2. 山根大輔、サン・ウィンストン、川崎繁男、藤田博之、年吉　洋、「エア分離ＣＰＷによるシリコン導波路の基礎検討とＫｕ帯ＲＦ−ＭＥＭＳスイッチへの応用」、電子情報通信学会論文誌Ｃ部門、Vol.J95-C, No.10, Oct. 2012, pp. 219-227.
  3. 諫本圭史、戸塚弘毅、酒井　徹、鈴木卓也、両澤　淳、鄭　昌鎬、藤田博之、年吉　洋、「高速ＭＥＭＳスキャナを用いた第三世代ＳＳ−ＯＣＴ用波長走査型光源」、電気学会論文誌Ｅ、vol. 132, no. 9, 2012, pp. 254-260. （第７１回電気学術振興賞（論文賞））
  4. 三田　信、丸山智史、安宅　学、年吉　洋、「電気回路シミュレータを用いたＭＥＭＳ電圧-周波数変換器のシミュレーション」、電気学会論文誌Ｅ、vol. 132, No. 7, 2012, pp. 189-194.
  5. 三田　信、安宅　学、藤田博之、年吉　洋、「宇宙用慣性駆動型マイクロアクチュエータ」、電気学会論文誌Ｅ、vol. 132, no. 5, 2012, pp. 965-102.
  6. A. Tixier-Mita, T. Takahashi, and H. Toshiyoshi, "Integration of Chemical Sensors with LSI Technology -- History and Applications --," IEICE Trans. Electronics, vol. E95.C, no. 5, 2012, pp. 777-784. (invited paper)
  7. 丸山智史、三田　信、諫本圭史、鄭　昌鎬、藤田博之、年吉　洋、「準平行平板型トーションミラーの等価回路モデル」、電気学会論文誌Ｅ、vol. 13、no. 4、2012, pp. 77-85.
  8. 三田　信、丸山智史、藤田博之、年吉　洋、「分岐型サスペンション構造への運動方程式等価回路モデルの応用」、電気学会論文誌Ｅ、vol. 132, no. 3, 2012, pp.64-65.
  9. S. Maruyama, M. Nakada, M. Mita, T. Takahashi, H. Fujita, and H. Toshiyoshi, "An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation," IEEJ Trans. SM, vol. 132, no. 1, pp. 1-9, 2012.
↑

Year 2011 (9 papers)†

  1. G. Tortissier, P. Ginet, B. Daunay, L. Jalabert, P. Lambert, B. Kim, H. Fujita, and H. Toshiyoshi, "CF4 plasma treatment-assisted inkjet printing for color pixel flexible display," J. Micromech. Microeng., vol. 21, 105021, 2011.
  2. Tadashi Ishida, Fabrizio Cleri, Kuniyuki Kakushima, Makoto Mita, Takaaki Sato, Masaki Miyata, Noriaki Itamura, Junji Endo, Hiroshi Toshiyoshi, Naruo Sasaki, Dominique Collard, and Hiroyuki Fujita, "Exceptional plasticity of silicon nanobridges," Nanotechnology, vol. 22, 2011, 355704.
  3. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita and Hiroshi Toshiyoshi, "A Ku-band Dual-SPDT RF-MEMS Switch by Double-side SOI Bulk-micromachining," IEEE/ASME J. Microelectromech. Syst., vol. 20, no. 5, 2011, pp. 1211-1221.
  4. 山根大輔、李　宥憲、藤田博之、年吉　洋、「メッキ金の厚膜マスクによるＲＦ−ＭＥＭＳコプレーナ導波路の製作」、電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）、vol. 131, no. 3, 2011, pp. 130-131.
  5. Yang-Che Chen, Chao Min Chang, Rongshun Chen, Max Ti-Kuang Hou, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "On the symmetry of electric fields exerting on interdigitated structures: Qucs equivalent circuit model and experiment," J. Micromech. Microeng., vol. 21, 2011, p.045026 (doi:10.1088/0960-1317/21/4/045026)
  6. Utku Baran, Masanao Tani, Masahiro Akamatsu, Yoshiaki Yasuda, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Built-in Vibration Sensor using Arc-Discharged Reactive Ion Plated PZT," IEEJ Trans. on Sensors and Micromachines, vol. 131, no. 3, 2011, pp. 128-129.
  7. Makoto Mita, Satoshi Maruyama, Yuheon Yi, Kazuhiro Takahashi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Multi-Physics Analysis for Micro Electromechanical Systems Based on Electrical Circuit Simulator," IEEJ Trans. on Electrical and Electronic Eng., Volume 6, Issue 2, March 2011, pp. 180–189.
  8. 年吉　洋、「シリコン酸化膜犠牲層エッチング技術」、電気学会Ｅ部門論文誌, vol. 131, no. 1, 2011, pp. 8-13.
  9. 諫本圭史、鄭　昌鎬、藤田博之、年吉　洋、「浮島構造を用いたＳＯＩ静電駆動型チルトミラーの信頼性改善」、電気学会Ｅ部門論文誌, vol. 131, no. 2, 2011, pp. 81-87.
↑

Year 2010 (5 papers)†

  1. Daisuke Yamane, Winston Sun, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design," IEICE Electronics Express, vol. 7, no. 24, 2010, pp. 1785-1789.
  2. T. Ishida, Y. Nakajima, K. Kakushima, M. Mita, H. Toshiyoshi, and H. Fujita, "Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation," J. Micromech. Microeng., vol. 20, 2010, 075011 (https://iopscience.iop.org/article/10.1088/0960-1317/20/7/075011).
  3. Cheng-Yao Lo, Olli-Heikki Huttunen, Johanna Hiitola-Keinanen, Jarno Petaja Hiroyuki Fujita, and Hiroshi Toshiyoshi, "MEMS-Controlled Paper-Like Transmissive Flexible Display," IEEE/ASME J. Microelectromech. Syst., vol. 19, no. 2, 2010, pp. 410-418.
  4. Muneki Nakada, Changho Chong, Atsushi Morosawa, Keiji Isamoto, Takuya Suzuki, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Optical coherence tomography by all-optical MEMS fiber endoscope," IEICE Electronics Express, vol. 7, no. 6, 2010, pp. 428-433.
  5. Daisuke Yamane, Winston Sun, Harunobu Seita, Shigeo Kawasaki, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An SOI bulk-micromachined dual SPDT RF-MEMS switch by layer-wise separation design of waveguide and switching mechanism," IEICE Electronics Express, vol. 7, No. 2, 2010, pp.80-85.
↑

Year 2009 (9 papers)†

  1. Cheng-Yao Lo, Johanna Hiitola-Keinänen, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate," Microelectronic Engineering, vol. 86, no. 4-6, 2009, pp. 979-983.
  2. David Dubuc, Katia Grenier, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Plastic-based microfabrication of artificial dielectric for miniaturized microwave integrated circuits," Metamaterials, vol. 3, no. 3-4, 2009, pp. 165-173.
  3. K. Grenier, D. Dubuc, P.-E. Poleni, M. Kumemura, H. Toshiyoshi, H. Fujii, and H. Fujita, "Integrated broadband microwave and microfluidic sensor dedicated to bioengineering," IEEE Transactions on Microwave Theory and Techniques, vol. 57, no. 12, part.2, 2009, pp. 3246-53.
  4. Y. Ohira, A. Chekhovskiy, T. Yamanoi, T. Endo, H. Fujita, and H. Toshiyoshi, "Hybrid MEMS optical scanner for volumetric 3-D displays," Journal of SID, vol. 17, no. 5, 2009, pp. 419-422.
  5. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Switched-Layer Design for SOI Bulk Micromachined XYZ Stage Using Stiction Bar for Interlayer Electrical Connection," IEEE/ASME J. Microelectromech. Syst., vol.18, no.4, 2009, pp. 818-827.
  6. Yuheon Yi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A micromachined voltage controlled oscillator using the pull-in mechanism of electrostatic actuation," IEICE Electronics Express, vol. 6, No. 17, (2009), pp.1266-1271.
  7. 大平康隆、藤田博之、年吉　洋、「ＭＥＭＳ技術による画像描画用光スキャナの小型化」、日本機械学会誌 2009.7, vol. 112, No. 1088, pp. 34-37.
  8. Cheng-Yao Lo, Johanna Kiitola-Keinänen, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display," Jpn. J. Appl. Phys. 48 (2009) 06FC04.
  9. Makoto Mita and Hiroshi Toshiyoshi, "An Equivalent-circuit Model for MEMS Electrostatic Actuator using Open-source Software Qucs," IEICE Electronics Express, vol 6, no. 5, 2009, pp. 256-263.
↑

Year 2008 (5 papers)†

  1. Cheng-Yao Lo, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Toward realization of transmissive display by MEMS etalon", IEICE ELEX, Vol. 5, No. 9, pp.326-331 (2008).
  2. A. Chekhovskiy and H. Toshiyoshi, "The Use of Laser Burst for Volumetric Displaying Inside Transparent Liquid," Japanese Journal of Applied Physics, vol. 47, no. 8 2008, pp. 6790-6793.
  3. A. Chekhovskiy, Y. Ohira, and H. Toshiyoshi, "Laser Breakdown 3D Display," IEICE Trans. Electron., vol. E91, No. C(10), 2008, pp.1616-1620.
  4. 谷　雅直、赤松雅洋、安田喜昭、藤田博之、年吉　洋、「圧電ＭＥＭＳ光スキャナによる画像ディスプレイ」、レーザー研究、第36巻4号、pp. 183-189、2008.
  5. B. Charlot, W. Sun, K. Yamashita, H. Fujita and H. Toshiyoshi, "Bistable nanowire for micromechanical memory," J. Micromech. Microeng. 18 045005 (7pp), 2008.
↑

Year 2007 (8 papers)†

  1. Edin Sarajlic, Dominique Collard, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Design and modeling of compliant micromechanism for mechanical digital-to-analog conversion of displacement," IEEJ Transactions on Electrical and Electronic Engineering, Volume 2, Issue 3, May 2007, Pages: 357–364.
  2. 藤田博之、年吉　洋、「大面積ＭＥＭＳ技術と整合する黒板型ディスプレイの製作と評価」、日本画像学会誌、第４６巻、第５号、pp. 401-406 (2007).
  3. T. Yamanoi, T. Endo, and H. Toshiyoshi, "A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter," Sensors and Actuators A 145–146 (2008) 116–122.
  4. K. Yamashita, W. Sun, B. Charlot, K. Kakushima, H. Fujita, and H. Toshiyoshi, "Vacuum, temperature, and time dependencies of field-emission current for RF-MEMS applications," Journal of Microelectronic Engineering vol. 84, pp. 1345-1353, 2007.
  5. Akira Nakajima, Akihito Imase, Shunsuke Suzuki, Naoya Yoshida, Munetoshi Sakai, Ayako Hashimoto, Yoshikazu Kameshima, Hiroshi Toshiyoshi, and Kiyoshi Okada, "Effect of electrification conditions on the freezing of supercooled water droplets on a hydrophobic coating," Chemistry Letters vol. 36, No. 8, 2007, pp. 1020-1021.
  6. A. Chekhovskiy and H. Toshiyoshi, "3-dimensional water display," IEICE Electronics Express Vol. 4 (2007), No. 14 pp.430-434.
  7. Kazuhiro Takahashi, Ho Nam Kwon, Makoto Mita, Kunihiko Saruta, Jong-Hyun Lee, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A silicon micromachined f-theta microlens scanner array by double-deck device design technique," IEEE Journal of Selected Topics in Quantum Electronics, vol. 13, no. 2, March/April 2007, pp. 277-282.
  8. 泰井祐輔，角嶋邦之，横川隆司，小野志亜之，高橋琢二，諫本圭史，鄭　昌鎬，藤田博之，年吉　洋，「フッ酸，オゾン，ＨＭＤＳを用いたＭＥＭＳデバイスの全気相処理によるスティクション力の低減」、電気学会Ｅ準部門誌, vol. 127, No. 4, 2007, pp. 221-227.
↑

Year 2006 (13 papers)†

  1. Satoshi Iwamoto, Satomi Ishida, Yasuhiko Arakawa, Masatoshi Tokushima, Akiko Gomyo, Hirohito Yamada, Akio Higo, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide," Appl. Phys. Lett., vol. 88, 2006, pp. 011104-1~3.
  2. H. N Kwon J. H. Lee, K. Takahashi K, and H. Toshiyoshi, "MicroXY stages with spider-leg actuators for two-dimensional optical scanning," SENSORS AND ACTUATORS A-PHYSICAL 130: 468-477 Sp. Iss. SI AUG 14 2006.
  3. Yusuke Taii, Akio Higo, Hiroyuki Fujita and Hiroshi Toshiyoshi, "A transparent sheet display by plastic MEMS," Journal of the Society for Information Display (J. SID), vol. 14, no. 8, Aug. 2006, pp. 735-741.
  4. F. Rose, M. Hattori, D. Kobayashi, H. Toshiyoshi, H. Fujita, and H. Kawakatsu, "Application of Capillarity Forces and Stiction for Lateral Displacement, Alignment, Suspension, and Locking of Self-Assembled Microcantilevers," J. Micromech. Microeng. vol. 16, 2006, pp. 2077-2085.
  5. 高原卓也，三田　信，武山芸英，浜田裕介，高橋巧也，年吉　洋，水野貴秀，「惑星探査機搭載用ＬＩＤＡＲの２次元走査機構に関する研究」、電気学会論文誌Ｅ（センサ・マイクロマシン準部門誌） vol. 126, no.8, 2006, pp. 476-480.
  6. 諫本圭史，鄭　昌鎬，藤田博之，年吉　洋，「ＭＥＭＳ光可変減衰器のためのデバイス実装技術」、エレクトロニクス実装学会誌 Vol. 9, No. 4 (2006), pp. 235-239.
  7. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "A high fill-factor comb-driven XY-stage with topological layer switch architecture," IEICE Electronics Express, vol.3, no.9, pp. 197-202, 2006.
  8. K. Yamashita, W. Sun, K. Kakushima, H. Fujita, and H. Toshiyoshi, "RF microelectromechanical system device with a lateral field-emission detector," J. Vac. Sci. Technol. B vol. 24, no. 2, pp. 927-931, 2006.
  9. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Transparent color pixels using plastic MEMS technology for electronic papers," IEICE Electronics Express, Vol. 3 No. 6 (2006) pp. 97-101.
  10. R. Shigematsu, A. Higo, H. Toshiyoshi, and H. Fujita, "An electrostatically latched and magnetically erased MEMS re-writable bitmap image display," IEICE Electronics Express, Vol. 3, No. 5 (2006), pp. 87-91.
  11. A. Higo, S. Iwamoto, S. Ishida, Y. Arakawa, M. Tokushima, A. Gomyo, H. Yamada, H. Fujita and H. Toshiyoshi, "Development of high-yield fabrication technique for MEMS-PhC devices," IEICE Electronics Express, Vol. 3, No. 3, pp. 39-43, (2006).
  12. Ming-Chiang M. Lee, Dooyoung Hah, Erwin K. Lau, Hiroshi Toshiyoshi, and Ming C. Wu, "MEMS-Actuated Photonic Crystal Switches," IEEE Photon. Tech. Lett., vol. 18, no. 2, pp. 358-360, 2006.
  13. C. Chong, K. Isamoto, and H. Toshiyoshi, "Optically Modulated MEMS Scanning Endoscope," Photon. Tech. Lett. vol. 18, no. 1, 2006, pp. 133-135.
↑

Year 2005 (7 papers, including 1 invited)†

  1. W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, "Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators," IEEE/ASME Journal of Microelectromechanical Systems, v 14, n 6, Dec. 2005, p 1329-38.
  2. 年吉　洋，「ＭＥＭＳ技術の光ファイバコンポーネントへの新展開」、レーザー研究, vol. 33, No. 11 (2005), pp. 721-726. (invited)
  3. 小尾浩士，山野井俊雄，藤田博之，年吉　洋，「Vertical Comb型静電駆動ミラーの安定化と光ファイバ可変減衰器への応用」、レーザー研究, vol. 33, No. 11 (2005).
  4. K. Takahashi, H. N. Kwon, K. Saruta, M. Mita, H. Fujita, H. Toshiyoshi, "A two-dimensional f-theta micro optical lens scanner with electrostatic comb-drive XY-stage," IEICE Electronics Express, Vol.2, No.21 (2005), pp. 542-547.
  5. K. Isamoto, T. Makino, A. Morosawa, C. Chong, H. Fujita, and H. Toshiyoshi, "Self-assembly technique for MEMS vertical comb electrostatic actuator," IEICE Electronics Express Vol. 2 (2005), No. 9, pp.311-315.
  6. M. Mita, H. Kawara, H. Toshiyoshi, J. Endo, and H. Fujita, "Bulk micromachined tunneling tips integrated with positioning actuators," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 14, Issue 1 Feb. 2005, pp. 23-28.
  7. Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, H. Toshiyoshi, "Piezoelectric 2D-optical micro scanners with PZT thick films," Integrated Ferroelectrics, Vol. 76, No. 1 (2005), pp. 81-91.
↑

Year 2004 (8 papers)†

  1. Hiroshi Toshiyoshi, "Micro Electro Mechanical devices for Fiber Optic Telecommunication," JSME Int. Journal, Series B, Vol. 47, No. 3 (2004), pp.439-446.
  2. Dooyoung Hah, Sophia Ting-Yu Huang, Jui-Che Tsai, Hiroshi Toshiyoshi, Ming C. Wu, "Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators," IEEE/ASME J. Microelectromech. Syst. 13 (2), 2004, pp. 279-289.
  3. Dooyoung Hah, Pamela R. Patterson, Hung D. Nguyen, Hiroshi Toshiyoshi, and Ming C. Wu, "Theory and Experiments of Angular Vertical Comb-Driven Actuators for Scanning Micromirrors," IEEE J. Selected Topics in Quantum Elec. (JSTQE), vol. 10, no. 3, May/June, 2004, pp. 505-513.
  4. 三田　信，年吉　洋，安宅　学，藤田博之，「マイクロマシンによる乱数の発生」、電気学会Ｅ準部門誌　第１２４巻９号，２００４年, pp. 316-320.
  5. Keiji Isamoto, Atsushi Morosawa, Masataka Tei, Hiroyuki Fujita and Hiroshi Toshiyoshi, "A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining," IEEE J. Selected Topics in Quantum Elec (JSTQE), vol. 10, No. 3, May-June 2004, pp. 570-578.
  6. 諫本圭史，両澤　淳，鄭　昌鎬，藤田博之，年吉　洋，「非対称駆動平行平板型チルトミラーを用いたＭＥＭＳ可変光減衰器」、電気学会論文誌Ｅ(センサ・マイクロマシン準部門誌) 2004年 Vol. 124-E, No. 6 (2004) pp.213-218.
  7. J.-C. Tsai, S. Huang, D. Hah, H. Toshiyoshi, and M. C. Wu, "Open-loop operation of MEMS-based 1×N wavelength-selective switch with long-term stability and repeatability," IEEE Photon. Tech. Lett., vol. 16, No. 4, 2004, pp. 1041-1043.
  8. 吉野智則，年吉　洋，三田　信，小林　大，藤田博之，「磁気ディスクヘッド素子駆動用静電マイクロアクチュエータ」、気学会論文誌Ｅ(センサ・マイクロマシン準部門誌) 2004年 Vol. 124-E, No. 1 (2004) pp. 21-27.
↑

Year 2003 (6 papers)†

  1. Matthieu Denoual, Laurent Griscom, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Accurate Double-Height Micromolding Method for Three-Dimensional Polydimethylsiloxane Structures," Jpn. J. Appl. Phys. Vol. 42 (2003) pp.4598-4601.
  2. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, and Ming C. Wu, "A Surface Micromachined Optical Scanner Array using Photoresist Lenses Fabricated by a Thermal Reflow Process," IEEE Journal of Lightwave Tech. Vol. 21, No. 7 (2003) pp. 1700-1708.
  3. 猿田訓彦、藤田博之、年吉　洋、「ＳＯＩ基板によるマイクロレンズ光スキャナの製作」、電気学会論文誌Ｅ、vol. 123, No. 7, 2003, pp. 231-236.
  4. Yamato Fukuta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware," Jpn. J. Appl. Phys. Vol. 42, Part 1, No. 6A (2003), pp. 3690 - 3694.
  5. Pei Yu Chiou, Hyejin Moon, Hiroshi Toshiyoshi, Chang-Jin Kim, and Ming C. Wu, "Light actuation of liquid by optoelectrowetting," Sensors and Actuators, A 104 (2003), pp. 222-228.
  6. 年吉　洋、「静電マイクロアクチュエータの駆動機構と設計限界」、計測と制御, vol. 42, No.1, (2003) pp. 18-23.
↑

Year 2002 (5 papers)†

  1. H. Kawakatsu, S. Kawai, D. Saya, M. Nagashio, D. Kobayashi, H. Toshiyoshi, and H. Fujita, "Towards atomic force microscopy up to 100 MHz," Review of Scientific Instruments, Vol. 73, No. 6 (2002), pp. 2317-2320.
  2. Hideki Kawakatsu, Daisuke Saya, Atsushi Kato, Kimitake Fukushima, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Millions of cantilevers for atomic force microscopy," Review of Scientific Instruments, Vol. 73, No. 3 (2002), pp. 1188-1192.
  3. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, H. Kawakatsu, "Fabrication of single-crystal Si cantilever array," Sensors and Actuators A: Physical, vol. 95, Issue 2-3, 2002, pp. 281-287.
  4. H. Toshiyoshi, M. Mita, and H. Fujita, "A MEMS Piggyback Actuator for Hard-Disk Drives," IEEE/ASME J. Microelectromech. Syst., vol. 11, No. 6, Dec. 2002, pp. 648-654.
↑

Year 2001 (2 papers)†

  1. G.-D. J. Su, H. Toshiyoshi, M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photonics Technology Letters 13: (6) 606-608 JUN 2001.
  2. Hiroshi Toshiyoshi, Wibool Piyawattanametha, Cheng Ta Chan, and Ming C. Wu, "Linearization of Electrostatically Actuated Surface Micromachined 2D Optical Scanner," IEEE/ASME J. Microelectromech. Syst. volume 10, June, 2001, pp. 205-214.
↑

Year 2000 (sabbatical at UCLA, 7 papers)†

  1. 藤田博之、年吉　洋、「マイクロメカニカル光デバイス」、応用物理　vol. 69, no. 11, 2000, pp. 1274-1284. (invited).
  2. Hiroyuki Fujita and Hiroshi Toshiyoshi, "Optical MEMS," IEICE Trans. Electron., vol. E83-C, No. 9, September 2000, pp. 1427-1434.
  3. Makoto Mita, Yoshio Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers," Trans. Institute of Electrical Engineers of Japan, vol. 120-E, No.11, November. 2000, p. 493.
  4. Daisuke Saya, Kimitake Fukushima, Hiroshi Toshiyoshi, Hiroyuki Fujita, Gen Hashiguchi, Hideki Kawakatsu, "Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators," Jpn. J. Appl. Phys. Vol. 39, Part 1. No. 6B (June 2000), pp. 3793-3798.
  5. H. Kawakatsu, H. Toshiyoshi, D. Saya, K. Fukushima, H. Fujita, "Strength measurement and calculations on silicon-based nanometric oscillators for scanning force microcopy operating in the gigahertz range," Applied Surface Science, vol.157, (no.4), 2000, pp. 320-5.
  6. Hiroshi Toshiyoshi, Dai Kobayashi, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Junji Endo, Yasuo Wada, "Microelectromechanical Digital-to-Analog Converter of Displacement for Step Motion Actuators," IEEE/ASME J. Microelectromech. Sys. vol. 9, June 2000, p.218-225.
  7. H. Kawakatsu, H. Toshiyoshi, D. Saya, K. Fukushima, H. Fujita, "Fabrication of a silicon based nanometric oscillator with a tip form mass for scanning force microcopy operating in the GHz range," J. Vac. Sci. & Tech. B18, No,.2 (2000) p.607-11.
↑

Year 1999 (sabbatical at UCLA, 10 papers)†

  1. Hiroshi Toshiyoshi, Dai Kobayashi, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Junji Endo, Yasuo Wada, "A Digital-to-Analog Converter of Displacement by Integrated Micromechanism," Jpn. J. Appl. Phys. Vol. 38 (1999), Part 2, Number 5B, p. L593.
  2. Kyoseok Chun, Gen Hashiguchi, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Fabrication of Array of Hollow Microcapillaries Used for Injection of Genetic Materials into Animal/Plant Cells," Jpn. J. Appl. Phys. Vol.38 (1999) pp. L279-L281, Part 2, No. 3A, 1 March 1999.
  3. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, "A Silicon Based Nanometric Oscillator for Scanning Force Microscopy Operation in the 100 MHz Range," Japanese Journal of Appl. Phys. vol. 38, Part 1, No. 6B, June 1999, pp. 3962-3965.
  4. Hiroshi Toshiyoshi, Masahide Goto, Makoto Mita, Hiroyuki Fujita, Dai Kobayashi, Gen Hashiguchi, Junji Endo, Yasuo Wada, "Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip," Japanese J. Appl. Phys. vol. 38, Part 1, No. 12B (Special Issue on Microprocesses & Nanotechnology), Dec. 1999, pp. 7185-7189.
  5. 三田　信、三田吉郎、年吉　洋、藤田博之、「遅延マスク法によるシリコンの３次元バルクマイクロ構造」、電気学会論文誌Ｅ、vol. 119, no. 5, 1999, pp. 310-311.
  6. Muneo Harada, Naoki Ikeuchi, Shoichi Fukui, Hiroshi Toshiyoshi, Hiroyuki Fujita, Shigeru Ando, "Micro Mechanical Acoustic Sensor toward Artificial Basilar Membrane Modeling," Trans. IEE Japan, vol.119-E, No.3 (1999) pp.125-130.
  7. Hiroshi Toshiyoshi, Daisuke Miyauchi, and Hiroyuki Fujita, "Electromagnetic Torsion Mirrors for Self-Aligned Fiber Optic Cross-connectors by Silicon Micromachining," IEEE Journal of Selected Topics in Quantum Electronics (JSTQE), special issue on Micro-Opto-Electro Mechanical Systems (MOEMS), vol.5, No.1 (1999), pp.10-17.
  8. Eric Bonnotte, Christophe Gorecki, Hiroshi Toshiyoshi, Hideki Kawakatsu, Hiroyuki Fujita, K. Worhoff, Ken-ya Hashimoto, "Guided-Wave Acousto-optic Interaction with Phase Modulation in a ZnO Thin-Film Transducer on an Si-Based Integrated Mach-Zehnder Interferometer," JEEE/OSA Journal of Lightwave Technology (JLT), vol. 17, No. 1 (1999), pp. 35-42.
  9. Hiroshi Toshiyoshi, Masakazu Kobayashi, Daisuke Miyauchi, and Hiroyuki Fujita, "Design and Analysis of Micromechanical Tunable Interferometers for WDM Free-Space Optical Interconnection," JEEE/OSA Journal of Lightwave Technology (JLT), vol. 17, No. 1 (1999), pp. 19-25.
  10. Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Self-Alignment Fabrication Technique Surface-Micromachined Optical Switches to Bulk-Micromachined V-Grooves," Trans. IEE Japan, vol. 119-E, No. 2 (1999) pp.108-112.
↑

Year 1998 (2 papers)†

  1. Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "SILICON MICRO MOTHERBOARDS FOR THREE-DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS," T.IEE Japan, 116-E(6), (1998), pp.444-448.
  2. Hiroyuki Fujita, Hiroshi Toshiyoshi, "Micro actuators and their applications," Microelectronics Journal 29 (1998), pp.637-640.
↑

Year 1997 (1 article)†

  1. 藤田博之、年吉　洋、「マイクロアクチュエータとその応用」、電子情報通信学会技術研究報告, EMD機構デバイス, 97(12), 1997, pp.1-6.
↑

Year 1996 (2 papers)†

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, "Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix," IEEE/ASME J. Microelectromechanical Systems Vol. 5, No. 4 (1996.12), pp. 231-237. DOI: 10.1109/84.546402
  2. H. Toshiyoshi, H. Fujita, "HIGH YIELD RELEASING TECHNIQUE BY USING A SILICON OXIDE DIAPHRAGM," T.IEE Japan, 116-E(7), (1996.7) pp.305-306. https://doi.org/10.1541/ieejsmas.116.305
↑

Year 1995 (1 article)†

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda, "A Piezoelectrically Operated Optical Chopper by Quartz Micromachining," IEEE/ASME Journal of Microelectromechanical Systems, vol. 4, no. 1, (1995) pp.3-9. DOI: 10.1109/84.365364
↑

Year 1994 (1 article)†

  1. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda, "A Piezoelectric Quartz Microactuator for a Large Pseudo Static Displacement," Jpn. J. Appl. Phys. Vol.33 (1994) pp.L1806-L1808. DOI 10.1143/JJAP.33.L1806
*1 Transferred from the original manuscript submitted to The Japan Institute of Electronics Packaging (JIEP) 2020 International Conference on Electronics Packaging (ICEP 2020), April 22-25, 2020, National Museum of Emerging Science and Innovation, Tokyo, Japan.
*2 ACS Nano Letters, Impact Factor 13.779 in 2015
*3 AIP Applied Physics Letters, Impact Factor 3.515 in 2012
トップ   新規 一覧 検索 最終更新   ヘルプ   最終更新のRSS