#author("2019-06-18T06:28:08+00:00","default:hiroshi","hiroshi") *Install LTspice [#kae41d5e] -https://www.analog.com/jp/design-center/design-tools-and-calculators/ltspice-simulator.html #author("2023-09-02T04:32:51+00:00","default:hiroshi","hiroshi") *References [#q9eda447] +Toshifumi Konishi, Katsuyuki Machida, Satoshi Maruyama, Makoto Mita, Kazuya Masu, and Hiroshi Toshiyoshi, "A Single-platform Simulation and Design Technique for CMOS-MEMS Based on a Circuit Simulator with Hardware Description Language," IEEE/ASME J. Microelectromech. Syst., vol. 22, no. 3, Jun. 2013, pp. 755-767. // +年吉 洋、小西敏文、「機械じかけのワンチップ加速度センサICからイメージ・センサまで」 CQ出版・トランジスタ技術、2017年5月号 -Download the files from~ --https://webfs.iis.u-tokyo.ac.jp/public/eHuQgAxH20iAl4ABN2FrEhJpD48_u_CxwFZl6Lp4_MLs -Obtain a password from the lab faculty *LTspice for MEMS [#i66a4ba0] -LTspice (MEMS).zip