#author("2019-10-09T05:56:59+00:00","default:hiroshi","hiroshi") #author("2023-09-10T07:15:06+00:00","default:hiroshi","hiroshi") *MEMS特集号に論文が掲載されました。&br;A paper is published in a special issue on MEMS.&br;2019-05-15 [#k972c7c6] #ref(2019-05-15.jpg,right,around,zoom,300x300) https://myukk.org/SM2017/article.php?ss=2388